High Power Excimer Laser Mirrors

External mirrors should be made to the same standards as intra-cavity optics.  Even outside the cavity, scatter and absorption can cause severe problems in high energy laser systems.   Mirrors are optimized for use at the laser wavelength at either 0° or 45° angle of incidence.  They are typically designed to have 99.5% reflectance at 0° or 99.0% minimum reflectance of the p-polarized component at 45°.

We offer mirrors for the following excimer lasers: F₂  157nm , ArF  193nm , KrF  248nm, XeCl  308nm , XeF  352nm

Substrates are chosen to be transmissive of the residual energy. 

For use with alignment beams a dual wavelength mirror can be supplied.   The second wavelength has a lower, but still useful, reflectivity, typically about 85%.

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